Control of temperature and fluid / Ultrapure water heating unit
Ultrapure water heating unit HDW-III
Overview
It is a unit that can efficiently warm ultrapure water by using carbon heater and adopt long life heaters.
Applications
Si wafer, GaAs wafer cleaning, liquid crystal display cleaning, mask cleaning, cleaning of hard disk substrate.
Specifications
| Model | HDW-III Series 4 Models (-12, -18, -24, -36) |
|---|---|
| Standard flow rate※ It depends on model | 12L/min～36L/min |
| Maxium set temparature※ It depends on model | 85℃ |
| Power supply (Heater)※ It depends on model | 3 Phase AC200V 150A～225A×2 |
|---|---|
| Power supply (Control) | Single-phase AC200V 5A |
| Number of heaters※ It depends on model | 2～6 |
Contact
Contact
Please feel free to contact us with any questions about equipment development and manufacturing, or requests for custom solutions.
042-659-3915
Weekdays 9:00–17:00 (Closed on weekends and holidays)
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