pump unit / high-pressure pump
FSBL-50
Overview
Available for explosion-proof areas because electricity is not used with air driven plunger pumps Ideal for incorporating lift-off devices, etc.s
Applications
The "FSBL Series" is a pump suited for lift-off equipment that removes films by high-pressure spraying of pure water, IPA, NMP, and other fluids onto wafers and the like.
Because it is air-driven, it can be used in locations requiring fire and explosion prevention measures.
Specifications
| Model | FSBL-50 |
|---|---|
| Discharge pressure | 2.5~25MPa |
| Discharge flow rate | 1.68L/min |
| Drive air pressure | 0.05~0.5MPa |
|---|---|
| Pilot air pressure | 0.3~0.5MPa |
| Wetted seal | Pure water, IPA · · · FKM NMP · · · Kalrez |
Related products
High Pressure Pump Product Lineup
Contact
Contact
Please feel free to contact us with any questions about equipment development and manufacturing, or requests for custom solutions.
042-659-3915
Weekdays 9:00–17:00 (Closed on weekends and holidays)
Contact
