pump unit / high-pressure pump
SSBL series
- ① SSBL-20
- ② SSBL-30
- ③ SSBL-37.5
Overview
Available for explosion-proof areas because electricity is not used with air driven plunger pumps Ideal for incorporating lift-off devices, etc.
Applications
Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning
Specifications
| Model | SSBL series |
|---|---|
| Discharge pressure | SSBL-20 : 0.98～9.8MPa SSBL-30 : 1.47～14.7MPa SSBL-37.5 : 1.76～17.6MPa |
| The discharge flow rate | SSBL-20 : 1.13L/min SSBL-30 : 0.71L/min SSBL-37.5 : 0.58L/min |
| The discharge flow rate | 0.05～0.5MPa |
|---|---|
| Air consumption | About 70L (when the pump stroke number 60SPM) |
| Wetted seal | Pure water, IPA · · · FKM NMP · · · Kalrez |
Description
The “SSBL Series” is a pump designed for use in lift-off equipment, which removes films from wafers and other substrates by high-pressure spraying of pure water, IPA, NMP, and other fluids.
Because it is air-driven, it can be used in locations requiring fire and explosion prevention measures.
Fluororesin and ultra-high-molecular-weight polyethylene are used as sealing materials in the pressure-boosting section.
O-rings are available in FKM or Calrets specifications.
We have been supplying these pumps to the market for 25 years, since 2000.
[Features]
■ Compact design ideal for integration
■ Discharge pressure can be controlled by adjusting the air supply pressure
■ Capable of boosting pressure up to 17.6 MPa with an air supply pressure of 0.5 MPa (SSBL-37.5A)
*For more details, please refer to the PDF brochure or feel free to contact us.
High Pressure Pump Product Lineup
Contact
Please feel free to contact us with any questions about equipment development and manufacturing, or requests for custom solutions.
042-659-3915
Weekdays 9:00–17:00 (Closed on weekends and holidays)
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