pump unit / high-pressure pump unit
KPW series
Overview
igh-pressure water generating unit with built-in air driven plunger pump. Air pressure regulator, air pressure gauge, discharge pressure gauge, etc. are united and suitable for incorporation into equipmen
Applications
Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning
Specifications
| Model | KPW series |
|---|---|
| Discharge pressure | KPW-20 : 0.98～9.8MPa KPW-30 : 1.47～14.7MPa KPW-37.5 : 1.76～17.6MPa |
| Discharge flow rate | KPW-20 : 1.13L/min KPW-30 : 0.71L/min KPW-37.5 : 0.58L/min |
| Drive air pressure | 0.05～0.5MPa |
|---|---|
| Air consumption | About 70L (when the pump stroke number 60SPM) |
| Wetted seal | Pure water, IPA · · · FKM NMP · · · Kalrez |
Related products
High Pressure Pump Product Lineup
Contact
Contact
Please feel free to contact us with any questions about equipment development and manufacturing, or requests for custom solutions.
042-659-3915
Weekdays 9:00–17:00 (Closed on weekends and holidays)
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