Control of temperature and fluid / Chemical liquid supply device

Canister unit P82

Overview

Acid type 2, alkaline type 1 undiluted liquid containers are stored, and undiluted liquid is supplied by pressurized pressure feed by N 2

Stock supply of the CMP apparatus

Filter	Capsule filter, 0.1 micron, made of polysulfone
Chemical liquid	Acids: H2O2, HF / Alkalis: NH4OH

Valve	Air-operated valve, PTFE
Exhaust	Built-in damper and manometer

Contact

Please feel free to contact us with any questions about equipment development and manufacturing, or requests for custom solutions.

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