Control of temperature and fluid / Chemical liquid supply device
Chemical liquid supplying apparatus P112
Overview
It is used to supply chemical liquid of a predetermined concentration to the CMP apparatus, and It has the function of supplying 2 lines of 2 kinds.
Applications
Semiconductor manufacturing equipment
Specifications
| Model | P112 |
|---|---|
| Diluent | NH4OH, H2O2, HF, DIW |
| Diluent flow rate | 2.2L/min max, 2 lines |
| Dilution time | 1 min / 2.2L |
|---|---|
| Supply pressure | 0.2MPa max |
| Power supply | Single-phase 100V–240V ±10%, 15A |
Related products
Chemical Liquid Supply Device Product Lineup
Contact
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