日本語

Inquiry is here
TEL: +81 42 659 3915
(business hours on weekdays 8:30-17:30)

テクノメイトロゴマーク

High-pressure pump

SSBL series

SSBL series
pump unit / high-pressure pump

    Product Summary
    Available for explosion-proof areas because electricity is not used with air driven plunger pumps Ideal for incorporating lift-off devices, etc.
    Use
    Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning

specification

  • Model

    SSBL series

  • Discharge pressure

    SSBL-20 : 0.98~9.8MPa
    SSBL-30 : 1.47~14.7MPa
    SSBL-37.5 : 1.76~17.6MPa

  • The discharge flow rate

    SSBL-20 : 1.13L/min
    SSBL-30 : 0.71L/min
    SSBL-37.5 : 0.58L/min

  • Driving air pressure

    0.05~0.5MPa

  • Air consumption

    About 70L (when the pump stroke number 60SPM)

  • Wetted seal

    Pure water, IPA · · · FKM
    NMP · · · Kalrez

Catalog PDF documents
(External site IPROS)
FSBL50

FSBL-50
pump unit / high-pressure pump

    Product Summary
    Available for explosion-proof areas because electricity is not used with air driven plunger pumps Ideal for incorporating lift-off devices, etc.s
    Use
    Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning

specification

  • Model

    FSBL-50

  • Discharge pressure

    2.5~25MPa

  • Doschage flow rate

    1.68L/min

  • Driving air pressure

    0.05~0.5MPa

  • Pilot sir pressure

    0.3~0.5MPa

  • Wetted seal

    Pure water, IPA · · · FKM
    NMP · · · Kalrez

Catalog PDF documents
(External site IPROS)
KPW series

KPW series
pump unit / high-pressure pump unit

    Product Summary
    High-pressure water generating unit with built-in air driven plunger pump. Air pressure regulator, air pressure gauge, discharge pressure gauge, etc. are united and suitable for incorporation into equipment
    Use
    Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning

specification

  • Model

    KPW series

  • Discharge pressure

    KPW-20 : 0.98~9.8MPa
    KPW-30 : 1.47~14.7MPa
    KPW-37.5 : 1.76~17.6MPa

  • The discharge flow rate

    KPW-20 : 1.13L/min
    KPW-30 : 0.71L/min
    KPW-37.5 : 0.58L/min

  • Driving air pressure

    0.05~0.5MPa

  • Air consumption

    About 70L (when the pump stroke number 60SPM)

  • Wetted seal

    Pure water, IPA · · · FKM
    NMP · · · Kalrez

Catalog PDF documents
(External site IPROS)
KPM-40B

KPM-40B
pump unit / high pressure pump unit

    Product Summary
    Two different outputs of independent pressure can be discharged at the same time. Dicing and deburring of CSP etc. can be done with one unit. Discharge operations are performed independently by external signals.
    Use
    Dicing and deburring of CSP etc.

specification

  • Model

    KPM-40B

  • Discharge pressure

    No1 4MPa 12L/min
    No2 2MPa 3L/min

  • The discharge flow rate

    Fixed at shipment Regarding discharge pressure and flow rate, we will adjust according to customer's request, so please consult us.

  • External dimensions

    W470*D800*H370

  • weight

    110kg

Catalog PDF documents
(External site IPROS)
KPM-5030

KPM-5030
pump unit / high pressure pump unit

    Product Summary
    The pump and the motor are arranged vertically to reduce the floor area.The flow rate characteristics can be varied by incorporating the inverter. It can be operated and stopped by an external signal.
    Use
    Cleaning of polished wafer

specification

  • Model

    KPM-5030

  • The discharge flow rate

    33.5L/min、 5MPa

  • Pure water specifications pressure

    0.3~0.4MPa

  • Supply air

    0.4~0.7MPa

  • Alarm function

    Supply water pressure decreases
    the inverter output abnormality

  • External dimensions

    W598*D548*H1224

  • weight

    150kg

Catalog PDF documents
(External site IPROS)