High-pressure pump

SSBL series
pump unit / high-pressure pump
- Product Summary
- Available for explosion-proof areas because electricity is not used with air driven plunger pumps Ideal for incorporating lift-off devices, etc.
- Use
- Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning
specification
-
Model
SSBL series
-
Discharge pressure
SSBL-20 : 0.98~9.8MPa
SSBL-30 : 1.47~14.7MPa
SSBL-37.5 : 1.76~17.6MPa -
The discharge flow rate
SSBL-20 : 1.13L/min
SSBL-30 : 0.71L/min
SSBL-37.5 : 0.58L/min
-
Driving air pressure
0.05~0.5MPa
-
Air consumption
About 70L (when the pump stroke number 60SPM)
-
Wetted seal
Pure water, IPA · · · FKM
NMP · · · Kalrez
(External site IPROS)

FSBL-50
pump unit / high-pressure pump
- Product Summary
- Available for explosion-proof areas because electricity is not used with air driven plunger pumps Ideal for incorporating lift-off devices, etc.s
- Use
- Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning
specification
-
Model
FSBL-50
-
Discharge pressure
2.5~25MPa
-
Doschage flow rate
1.68L/min
-
Driving air pressure
0.05~0.5MPa
-
Pilot sir pressure
0.3~0.5MPa
-
Wetted seal
Pure water, IPA · · · FKM
NMP · · · Kalrez
(External site IPROS)

KPW series
pump unit / high-pressure pump unit
- Product Summary
- High-pressure water generating unit with built-in air driven plunger pump. Air pressure regulator, air pressure gauge, discharge pressure gauge, etc. are united and suitable for incorporation into equipment
- Use
- Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning
specification
-
Model
KPW series
-
Discharge pressure
KPW-20 : 0.98~9.8MPa
KPW-30 : 1.47~14.7MPa
KPW-37.5 : 1.76~17.6MPa -
The discharge flow rate
KPW-20 : 1.13L/min
KPW-30 : 0.71L/min
KPW-37.5 : 0.58L/min
-
Driving air pressure
0.05~0.5MPa
-
Air consumption
About 70L (when the pump stroke number 60SPM)
-
Wetted seal
Pure water, IPA · · · FKM
NMP · · · Kalrez
(External site IPROS)

KPM-40B
pump unit / high pressure pump unit
- Product Summary
- Two different outputs of independent pressure can be discharged at the same time. Dicing and deburring of CSP etc. can be done with one unit. Discharge operations are performed independently by external signals.
- Use
- Dicing and deburring of CSP etc.
specification
-
Model
KPM-40B
-
Discharge pressure
No1 4MPa 12L/min
No2 2MPa 3L/min -
The discharge flow rate
Fixed at shipment Regarding discharge pressure and flow rate, we will adjust according to customer's request, so please consult us.
-
External dimensions
W470*D800*H370
-
weight
110kg
(External site IPROS)

KPM-5030
pump unit / high pressure pump unit
- Product Summary
- The pump and the motor are arranged vertically to reduce the floor area.The flow rate characteristics can be varied by incorporating the inverter. It can be operated and stopped by an external signal.
- Use
- Cleaning of polished wafer
specification
-
Model
KPM-5030
-
The discharge flow rate
33.5L/min、 5MPa
-
Pure water specifications pressure
0.3~0.4MPa
-
Supply air
0.4~0.7MPa
-
Alarm function
Supply water pressure decreases
the inverter output abnormality -
External dimensions
W598*D548*H1224
-
weight
150kg
(External site IPROS)